Skip to Main content Skip to Navigation
New interface
Journal articles

Prediction of the evolution of defects induced by the heated implantation process: Contribution of kinetic Monte Carlo in a multi-scale modeling framework

Abstract : Extended defects formed as a result of heated implantation and thermal annealing are studied using transmission electron microscopy and kinetic Monte Carlo simulations. We highlight the relevance of using kinetic Monte Carlo approach to provide information to continuum-scale simulations as well as the value of integrating data from atomic-scale calculations for its calibration.
Document type :
Journal articles
Complete list of metadata

https://hal.laas.fr/hal-03867418
Contributor : Anne Hemeryck Connect in order to contact the contributor
Submitted on : Wednesday, November 23, 2022 - 12:46:01 PM
Last modification on : Friday, November 25, 2022 - 3:30:10 AM

File

Julliard-SolidStateElectronic....
Files produced by the author(s)

Identifiers

Citation

P.L. Julliard, A. Johnsson, N. Zographos, R. Demoulin, R. Monflier, et al.. Prediction of the evolution of defects induced by the heated implantation process: Contribution of kinetic Monte Carlo in a multi-scale modeling framework. Solid-State Electronics, In press, pp.108521. ⟨10.1016/j.sse.2022.108521⟩. ⟨hal-03867418⟩

Share

Metrics

Record views

0

Files downloads

0